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ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms - Assessment of suitability for use of equipment by airborne particle concentration

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ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms - Assessment of suitability for use of equipment by airborne particle concentration1 Scope This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e. g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644 1. Particle sizes range from 0,1 m to equal to or larger than 5 m (given in ISO 14644 1). NOTE Where regulatory agencies impose supplementary

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in accordance with the requirements which include the BS number of this detailed specification

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